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Guest Editorial Special Section on the International Conference on Microelectronic Test Structures (ICMTS).

Authors :
Sekitani, Tsuyoshi
Source :
IEEE Transactions on Semiconductor Manufacturing. May2020, Vol. 33 Issue 2, p144-145. 2p.
Publication Year :
2020

Abstract

As a guest Editor for the special section on the 2017, 2018, and 2019 International Conference on Microelectronic Test Structures (ICMTS), I am gratified to be able to present our IEEE Transactions on Semiconductor Manufacturing readers with a selection of papers based on work presented at the 2017, 2018, and 2019 conferences. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
08946507
Volume :
33
Issue :
2
Database :
Academic Search Index
Journal :
IEEE Transactions on Semiconductor Manufacturing
Publication Type :
Academic Journal
Accession number :
143174190
Full Text :
https://doi.org/10.1109/TSM.2020.2988318