Thermally assisted nanotransfer printing with sub-20-nm resolution and 8-inch wafer scalability.

The article demonstrates various complex pattern geometries, such as wave, square, nut, zigzag, and elliptical nanostructures, on diverse substrates via thermally assisted nanotransfer printing (T-nTP). It focuses on the state-of-the-art T-nTP process which combined with other emerging patterning techniques for the large-area nanofabrication of various devices; also highlights the use of a heat-rolling press system.