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Non-volatile, small-signal capacitance in ferroelectric capacitors.
- Source :
-
Applied Physics Letters . 8/17/2020, Vol. 117 Issue 7, p073501-1-073501-5. 5p. - Publication Year :
- 2020
-
Abstract
- Tunable, non-volatile, small-signal capacitance is observed and characterized in a TiN/ferroelectric Hf0.5Zr0.5O2 (HZO)/TiN stack. The non-volatility of the small-signal capacitance originates from the non-uniform distribution of oxygen vacancies near/at the bottom electrode, resulting in polarity-dependent responses of the domain-wall vibration. Our hypothesis also agrees with the observed frequency dispersion, which could be explained with the Maxwell Wagner effect. Furthermore, we have shown more than 104 endurance and 10-year retention at 85 °C for this non-volatile capacitance. With tunable capacitance at a fixed bias, HZO capacitors can potentially be applied to reconfigurable analog or mixed-signal circuits. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 117
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 145269954
- Full Text :
- https://doi.org/10.1063/5.0018937