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Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment.
- Source :
-
Shock & Vibration . 8/24/2020, p1-16. 16p. - Publication Year :
- 2020
-
Abstract
- In a multiple degrees of freedom motion system with rigid-flexible coupling, the flexible internal dynamics have a significant negative impact on performance because the degrees of freedom are coupled. Inspired by this problem, a multi-input multioutput state-space model based on modal coordinates is proposed to decouple the rigid body and flexible modes. The closed-loop subspace identification method based on orthogonal is utilized to develop an unbiased standard state-space model. Based on the similarity principle, a modal analysis method is proposed to transfer the standard state-space model to the proposed modal-decomposition-dependent state-space model. Controllability and observability criteria are met to guarantee the minimum realization of the proposed state-space model. Finally, a modeling and modal analysis experiment is conducted on a developed wafer stage of lithographic tool. The results verify the effectiveness and accuracy of the proposed modeling method, as well as the controllability and observability of the proposed model. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10709622
- Database :
- Academic Search Index
- Journal :
- Shock & Vibration
- Publication Type :
- Academic Journal
- Accession number :
- 145286854
- Full Text :
- https://doi.org/10.1155/2020/8859222