Modification of structure and wear resistance of closed-field unbalanced-magnetron sputtered MoS2 film by vacuum-heat-treatment.

MoS 2 film deposited was deposited by closed-field unbalanced-magnetron sputtering (CFUBMS), and its structural and tribological properties were modified by the heat treatment at temperature range of 100–500 °C in vacuum environment. Results revealed that as-deposited MoS 2 film was composed of MoS 2 plus a little MoO 3 with a dense amorphous-like structure. After the vacuum heat treatment, MoS 2 film was still very compact, but its microstructure was changed from amorphous-like to nano-crystalline states with the increase of heat treatment temperature. As a result, a MoS 2 film with a microstructure of MoS 2 nanocrystals embedded into its own amorphous matrix was obtained at middle temperature of 200 °C. Furthermore, MoO 3 phase in the film was reduced to MoO 2 after the vacuum heat treatment at high temperatures of 400 and 500 °C. Friction tests revealed that the wear resistance of MoS 2 film in vacuum environment was significantly improved by the vacuum heat treatment at suitable temperature. The wear life of vacuum-heat-treated MoS 2 film at 200 °C for 3 h was ~6.2 × 105 r, about four times longer than that of as-deposited MoS 2 film. Unlabelled Image • Amorphous-like MoS 2 film changed structure to nanocrystal states, embedded into matrix to improve wear resistance by vacuum-heat-treatment. • Its structure and wear resistance may be significantly modified by vacuum-heat-treatment. • Film structure changed from amorphous-like to nanocrystal states by vacuum-heat-treatment. • A special structure of MoS 2 nanocrystals embedded into its own amorphous matrix was obtained at suitable temperature of heat treatment. • Wear life of vacuum-heat-treated MoS 2 film at 200 °C was about four times longer than that of as-deposited MoS 2 film. [ABSTRACT FROM AUTHOR]