Effect of argon and oxygen gas concentration on mode transition and negative ion production in helicon discharge.

In this paper, the effect of mixing of argon and oxygen gas on the mode transition and negative ion production in the helicon discharge is investigated. In the source chamber of the experimental setup, argon–oxygen gas mixture plasma is produced by applying RF power from 100 W to 2000 W at an applied magnetic field of 0.03 T. In this experiment, the total flow rate is kept at 200 SCCM, corresponding to the working pressure of 4–5 × 10−1 Pa. The mode transition to helicon discharge is investigated by varying the concentration of these two gases. To the best of our knowledge, the literature survey indicates this to be the first study of the influence of the mixing of oxygen–argon gas on the mode transition from the inductive to the helicon mode. It is observed that an increase in the concentration of oxygen gas in the discharge shifts mode transition toward higher RF power values, indicating the influence of the nature of the working gas on the transition to the inductive as well as to the helicon mode. The variation of the electron density and temperature is explained in terms of particle and power balance equation. In the source and in the downstream expansion chamber, the effect of the concentration of argon gas on the negative ion production in oxygen discharge is also studied, and the results are explained in terms of various reactions involved in the production and loss of negative ions. [ABSTRACT FROM AUTHOR]