Diamond micro-CRL for Coherent x-ray imaging and microscopy.

We demonstrate the capabilities of ion-beam lithography (IBL) for the manufacturing of the X-ray refractive micro-optics. With the help of IBL, the hardest of current materials - diamond - was milled, and microscale diamond lenses were produced. Lenses have a rotationally parabolic profile with radii of parabola apexes less than 5 µm. As has been confirmed with SEM and AFM, shape profile errors of fabricated lenses were<200 nm, while the surface roughness was estimated to be 50 nm. Single lenses were stacked in the CRL within one technological process with high alignment precision. [ABSTRACT FROM AUTHOR]