Discharge properties of a coaxial plasma jet at different microwave frequencies.

This article investigated the discharge characteristics of Ar plasma sustained by a coaxial plasma jet under different microwave frequencies (433 MHz, 915 MHz, 2450 MHz, and 5800 MHz). Clear distinctions of the discharge characteristics such as excitation and plasma-sustaining power, shape, electron number density, electron temperature, and so on were experimentally obtained under these operating frequencies. The results demonstrated that microwave powers at different frequencies could excite distinct particles. The higher the microwave frequency, the lower the excitation and the plasma-sustaining power. However, these powers did not decline linearly to the increase in microwave frequency. The Ar plasma at a frequency of 5800 MHz exhibited an upside-down "bell" shape and a larger cross section, while those at other three frequencies seemed to have thin and long plumes. The investigation also revealed that the electron temperature increased and then decreased, while the electron number density and gas temperature elevated monotonously with increasing frequency. This study is intended to be helpful in determining the optimal frequency and design microwave plasma sources for certain applications. [ABSTRACT FROM AUTHOR]