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Growth kinetics of the ferroelectric Al-doped HfO2 thin films via synergistic effect of various essential factors.
- Source :
-
Ceramics International . Feb2021, Vol. 47 Issue 4, p4674-4680. 7p. - Publication Year :
- 2021
Details
- Language :
- English
- ISSN :
- 02728842
- Volume :
- 47
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Ceramics International
- Publication Type :
- Academic Journal
- Accession number :
- 147995306
- Full Text :
- https://doi.org/10.1016/j.ceramint.2020.10.034