Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection.

This paper presents an airborne piezoelectric micromachined ultrasonic transducers (PMUTs) operated at low frequency (40–50 kHz) for long-range detection, where the acoustic absorption loss in air is relatively low (0.8–1 dB/m). The PMUTs made with single-crystal Lead Zirconate Titanate (PZT) enables a high piezoelectric coefficient (${e} _{31, f} \approx ~16$ - 24 C/ $\text{m}^{{2}}$), and a low dielectric constant ($\varepsilon _{\mathrm {r}}~\approx ~308$), achieving high PMUT transceiver efficiency. The $2\times 2$ PMUT array achieves a very high sound pressure level (SPL) output of 109.4 dB at 26 cm distance. Different from conventional PZT PMUTs, this study utilized single-crystal PZT with a low permittivity to achieve a good acoustic reception, demonstrating the sensitivity of 2 mV/Pa. This work reports the PMUT design, modeling, fabrication, characterization, enabling a long-range detection of 4.8 meters in a pulse-echo experiment, which was conducted by a pair of $2\times 2$ PMUT arrays with the matched resonances. [2020-0270] [ABSTRACT FROM AUTHOR]