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RF discharge diagnostics: Some problems and their resolution.
- Source :
-
Journal of Applied Physics . 1/28/2021, Vol. 129 Issue 4, p1-30. 30p. - Publication Year :
- 2021
-
Abstract
- In this paper, we discuss a number of problems found in the literature related to experimental measurements of rf discharge electrical and plasma parameters with different electromagnetic probes. Incorrect evaluations of discharge power and the inaccurate measurement of basic plasma parameters with electrical (Langmuir), magnetic (B-dot), and microwave probes are among the troubling issues found in many recent publications on rf plasma. The purpose of this review is to show the origination of errors and ways to their mitigation based on the three-decade development of contemporary rf discharge diagnostics. [ABSTRACT FROM AUTHOR]
- Subjects :
- *HIGH-frequency discharges
*PLASMA flow
*COMPUTATIONAL electromagnetics
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 129
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 148403888
- Full Text :
- https://doi.org/10.1063/5.0024258