Monolithic Integrated AlGaN/GaN Power Converter Topologies on High‐Voltage AlN/GaN Superlattice Buffer.

Monolithic Integrated AlGaN/GaN Power Converter Topologies on High-Voltage AlN/GaN Superlattice Buffer B Semiconductor Superlattices b The picture shows a monolithic power converter, fabricated in a lateral AlGaN/GaN-on-Si process on an improved AlN/GaN super-lattice buffer epitaxy. The super-lattice reduces vertical leakage and back-gating effects compared to step-graded buffers. [Extracted from the article]