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Micro-milling/micro-EDM combined processing technology for complex microarray cavity fabrication.
- Source :
-
International Journal of Advanced Manufacturing Technology . Mar2021, Vol. 113 Issue 3/4, p1057-1071. 15p. 11 Diagrams, 2 Charts, 6 Graphs. - Publication Year :
- 2021
-
Abstract
- An integrated method of micro-milling and micro electrical discharge machining (EDM) is proposed for micro-structures array manufacture in this paper. In order to obtain micro-cavity array with high accuracy and consistency, in situ machining on the same coordinate system ensures the positioning precision. After studying micro-milling graphite, the effect of parameters on the machining accuracy is found. Further, suitable mode is chosen for high-dimensional consistency and good surface quality array electrodes according to comparison of one-by-one and layer-by-layer milling tool trajectory. Workpiece lifting control is used to strengthen the debris clear; then, it is verified beneficial of lifting through flow simulation and adding discrete particles. In order to solve poor precision of the micro-cavity contour caused by electrode wear, a multi-step machining by group electrodes is proposed, rough machining for material removal and finishing machining for trimming. Finally, a micro-cavity with clear edge, small fillets, and high shape accuracy is obtained. This method improves the machining performance of the array micro-structures and shows good prospects in micro-fabrication. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 02683768
- Volume :
- 113
- Issue :
- 3/4
- Database :
- Academic Search Index
- Journal :
- International Journal of Advanced Manufacturing Technology
- Publication Type :
- Academic Journal
- Accession number :
- 149130236
- Full Text :
- https://doi.org/10.1007/s00170-021-06674-7