Investigation of incubation in ArF excimer laser irradiated poly(methyl-methacrylate) using pulsed force mode atomic force microscopy.

An atomic force microscopic method to study the incubation states of UV laser irradiated polymer samples is presented. Targets were illuminated by different number of pulses at 5.8 and 8.9 mJ/cm2 fluences. The induced adhesive and morphological changes were investigated simultaneously by an atomic force microscope equipped with a pulsed force mode extension. Importantly, below 100 pulses morphological changes were not observable while significant changes in the adhesion were found as a result of the incubation at 8.9 mJ/cm2 fluence. This method allows the imaging and detection of the whole laser modified area with nanometer resolution. [ABSTRACT FROM AUTHOR]