On-machine measurement method for micro-structured surface by integral imaging with workpiece rotating technique.

To measure large and heavy micro-structured workpieces in situ and improve the measurement accuracy, which strongly depends on the environment during the measurement of micro-structured surfaces, a workpiece rotating technique is proposed. This method utilizes the precise rotation of machine tools to drive the workpiece and records a set of elemental image arrays for the pickup stage to overcome the upper-resolution limit imposed by the Nyquist sampling theorem, which allows the increase in the two-dimensional spatial resolution of the computed depth images in integral imaging. By extracting the depth position, we can obtain accurate depth information and measurement results for micro-structured surfaces. We carried out simulations and experiments to demonstrate the proposed method, and the results show the feasibility of our method. [ABSTRACT FROM AUTHOR]