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3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator.
- Source :
-
Measurement Science Review . Jun2021, Vol. 21 Issue 3, p76-81. 6p. - Publication Year :
- 2021
-
Abstract
- This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 13358871
- Volume :
- 21
- Issue :
- 3
- Database :
- Academic Search Index
- Journal :
- Measurement Science Review
- Publication Type :
- Academic Journal
- Accession number :
- 151079265
- Full Text :
- https://doi.org/10.2478/msr-2021-0011