Reconstruction algorithm of 3D surface in scanning electron microscopy with backscattered electron detector.

Authors :: Borzunov, Andrey A.
Lukyanenko, Dmitry V.
Rau, Eduard I.
Yagola, Anatoly G.
Source :: Journal of Inverse & Ill-Posed Problems. Oct2021, Vol. 29 Issue 5, p753-758. 6p.
Publication Year :: 2021
Abstract: A new technique for three-dimensional surface reconstruction of relatively smooth surface topography using the scanning electron microscopy with backscattered electron detector is considered. Experiments show high effectiveness of the method. [ABSTRACT FROM AUTHOR]

Subjects :: *SCANNING electron microscopy
*ELECTRON microscopy
*ALGORITHMS
*DETECTORS
*SURFACE reconstruction

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