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Reconstruction algorithm of 3D surface in scanning electron microscopy with backscattered electron detector.
- Source :
-
Journal of Inverse & Ill-Posed Problems . Oct2021, Vol. 29 Issue 5, p753-758. 6p. - Publication Year :
- 2021
-
Abstract
- A new technique for three-dimensional surface reconstruction of relatively smooth surface topography using the scanning electron microscopy with backscattered electron detector is considered. Experiments show high effectiveness of the method. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09280219
- Volume :
- 29
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- Journal of Inverse & Ill-Posed Problems
- Publication Type :
- Academic Journal
- Accession number :
- 152738623
- Full Text :
- https://doi.org/10.1515/jiip-2020-0136