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RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook.
- Source :
-
Journal of Micromechanics & Microengineering . Nov2021, Vol. 31 Issue 11, p1-13. 13p. - Publication Year :
- 2021
-
Abstract
- This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO3) based acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and great frequency scalability, thin-film LiNbO3 has outperformed state-of-the-art acoustic technologies in the past decade. This paper first reviews the acoustic wave transduction and propagation in thin-film LiNbO3 and then showcases the emerging acoustic applications. Outlook for further platform development and more functions is offered for future thin-film LiNbO3 based acoustic microsystems development. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 13616439
- Volume :
- 31
- Issue :
- 11
- Database :
- Academic Search Index
- Journal :
- Journal of Micromechanics & Microengineering
- Publication Type :
- Academic Journal
- Accession number :
- 152800936
- Full Text :
- https://doi.org/10.1088/1361-6439/ac288f