Back to Search
Start Over
Highly Selective Guiding Springs for Large Displacements in Surface MEMS.
- Source :
-
Journal of Microelectromechanical Systems . Aug2021, Vol. 30 Issue 4, p597-611. 15p. - Publication Year :
- 2021
-
Abstract
- In this paper we introduce the concept, modelling and analysis of triangular and sinusoidal springs intended for large in-plane translational displacements for MEMS-guiding applications. The proposed spring systems combine the advantages of minimal space requirement, low stiffness in the axial direction and high mechanical resistance in off-axis directions. An analytical model for the description of the force-displacement characteristic of triangular springs is derived considering typical mechanical constraints. Based on the model, geometrical parameters of the springs influencing linearity and selectivity with respect to the in- and off-axis stiffness are analyzed. The validity of the models is demonstrated by finite element analysis and experimental verification realized by silicon-on-insulator demonstrators. [2020-0360] [ABSTRACT FROM AUTHOR]
- Subjects :
- *FINITE element method
*MICROELECTROMECHANICAL systems
Subjects
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 30
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 153068858
- Full Text :
- https://doi.org/10.1109/JMEMS.2021.3074822