Cite
FDC Based on Neural Network With Harmonic Sensor to Prevent Error of Robot.
MLA
Kamizono, Kenta, et al. “FDC Based on Neural Network With Harmonic Sensor to Prevent Error of Robot.” IEEE Transactions on Semiconductor Manufacturing, vol. 34, no. 3, Aug. 2021, pp. 291–95. EBSCOhost, https://doi.org/10.1109/TSM.2021.3071178.
APA
Kamizono, K., Ikeda, K., Kitajima, H., Yasuda, S., & Tanaka, T. (2021). FDC Based on Neural Network With Harmonic Sensor to Prevent Error of Robot. IEEE Transactions on Semiconductor Manufacturing, 34(3), 291–295. https://doi.org/10.1109/TSM.2021.3071178
Chicago
Kamizono, Kenta, Kazutaka Ikeda, Hiroaki Kitajima, Satoshi Yasuda, and Tomoya Tanaka. 2021. “FDC Based on Neural Network With Harmonic Sensor to Prevent Error of Robot.” IEEE Transactions on Semiconductor Manufacturing 34 (3): 291–95. doi:10.1109/TSM.2021.3071178.