Periodic cylindrical structure of micro-swelling silicone rubber fabricated by ArF excimer laser.

Cylindrical structure of micro-swelling silicone rubber of approximately 1 µm diameter and 1.5 to 2 µm height was fabricated by the 193-nm ArF excimer laserinduced photodissociation of Si-O bonds of silicone rubber. To be periodically, single layer of silica glass microspheres was aligned on aluminum-coated silicone rubber during laser irradiation. The silicone rubber underneath each microsphere photochemically swelled, after laser-ablating aluminum to limit a diameter of the swelling. The aluminum also adjusted a focal point to the surface of silicone rubber to form a hole approximately 0.5 µm diameter centered at each the swelled silicone rubber. A purging O2 molecules in the laser beam path by N2 gas and lowering the laser pulse repetition rate were effective for fabricating the regular cylindrical structure. The regular cylindrical structure of micro-swelling silicone rubber showed superhydrophobicity. [ABSTRACT FROM AUTHOR]