Back to Search
Start Over
A Wafer-Level Packaged CMOS MEMS Pirani Vacuum Gauge.
- Source :
-
IEEE Transactions on Electron Devices . Oct2021, Vol. 68 Issue 10, p5155-5161. 7p. - Publication Year :
- 2021
-
Abstract
- In this article, we report a wafer-level packaged Pirani vacuum gauge using the proprietary InvenSense CMOS MEMS technology. The micro Pirani vacuum gauge features three serpentine-shaped molybdenum thermistors on the suspended silicon-on-insulator (SOI) bridges, while the wiring gap of each serpentine-shaped silicon microbridge is 1.6 ${ {\mu }}\text{m}$. For the vacuum range of $5\times 10^{-{4}}$ –760 Torr, the CMOS MEMS Pirani gauge configured with a constant temperature interface circuit achieves a sensitivity of 0.414 V/Torr in a very fine vacuum regime, while its heating power is less than 21.3 mW. Moreover, the measured output of the micro Pirani gauge shows good agreement with a semi-empirical model, while the model predicts that the proposed Pirani gauge can measure a vacuum pressure as low as $2.6\times 10^{-{4}}$ Torr. The performance achieved by this Pirani vacuum gauge combined with its high level of integration makes it a promising Internet of Things (IoT) sensing node for vacuum monitoring in the industry. [ABSTRACT FROM AUTHOR]
- Subjects :
- *WAFER level packaging
*INTERFACE circuits
*VACUUM technology
*GAGES
*THERMISTORS
Subjects
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 68
- Issue :
- 10
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- 153710667
- Full Text :
- https://doi.org/10.1109/TED.2021.3103486