ON-Resistance Analysis of GaN Reverse-Conducting HEMT With Distributive Built-In SBD.

Recently, a GaN reverse-conducting high-electron-mobility transistor (RC-HEMT) has been demonstrated. The RC-HEMT features built-in distributive Schottky contacts, which provide a low-loss freewheeling path. The RC-HEMT offers the same functionality as an HEMT/Schottky barrier diode (SBD) pair, but consumes much less chip area, thus its ${R}_{ \mathrm{\scriptscriptstyle ON}}$ (ON-resistance $\times $ total device width) is significantly reduced. Theoretically, ${R}_{ \mathrm{\scriptscriptstyle ON}}$ of the RC-HEMT can approach that of an HEMT. In practice, due to certain geometry limitations, ${R}_{ \mathrm{\scriptscriptstyle ON}}$ of an RC-HEMT lies between an HEMT/SBD pair and a single HEMT. This work investigates the factors that influence ${R}_{ \mathrm{\scriptscriptstyle ON}}$ of the RC-HEMT using both experimental measurements and numerical simulations. It is found that ${R}_{ \mathrm{\scriptscriptstyle ON}}$ of the RC-HEMT is strongly affected by the geometry of the source and channel regions, where HEMT sections and SBD sections are interdigitally distributed. With coarse patterning of these regions, ${R}_{ \mathrm{\scriptscriptstyle ON}}$ of the RC-HEMT is close to the HEMT/SBD pair. Through proper geometry scaling, ${R}_{ \mathrm{\scriptscriptstyle ON}}$ of RC-HEMT is reduced and approaches that of HEMT. [ABSTRACT FROM AUTHOR]