Cite
Two-step femtosecond laser etching for bulk micromachining of 4H–SiC membrane applied in pressure sensing.
MLA
Wang, Lukang, et al. “Two-Step Femtosecond Laser Etching for Bulk Micromachining of 4H–SiC Membrane Applied in Pressure Sensing.” Ceramics International, vol. 48, no. 9, May 2022, pp. 12359–67. EBSCOhost, https://doi.org/10.1016/j.ceramint.2022.01.100.
APA
Wang, L., Zhao, Y., Yang, Y., & Zhao, Y. (2022). Two-step femtosecond laser etching for bulk micromachining of 4H–SiC membrane applied in pressure sensing. Ceramics International, 48(9), 12359–12367. https://doi.org/10.1016/j.ceramint.2022.01.100
Chicago
Wang, Lukang, You Zhao, Yu Yang, and Yulong Zhao. 2022. “Two-Step Femtosecond Laser Etching for Bulk Micromachining of 4H–SiC Membrane Applied in Pressure Sensing.” Ceramics International 48 (9): 12359–67. doi:10.1016/j.ceramint.2022.01.100.