Cite
Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids.
MLA
Moll, Philipp, et al. “Biocompatible A-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids.” Journal of Microelectromechanical Systems, vol. 31, no. 3, June 2022, pp. 372–83. EBSCOhost, https://doi.org/10.1109/JMEMS.2022.3163477.
APA
Moll, P., Pfusterschmied, G., Schneider, M., Dorfmeister, M., Knafl, S., Wanzenboeck, H. D., & Schmid, U. (2022). Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids. Journal of Microelectromechanical Systems, 31(3), 372–383. https://doi.org/10.1109/JMEMS.2022.3163477
Chicago
Moll, Philipp, Georg Pfusterschmied, Michael Schneider, Manuel Dorfmeister, Sebastian Knafl, Heinz D. Wanzenboeck, and Ulrich Schmid. 2022. “Biocompatible A-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids.” Journal of Microelectromechanical Systems 31 (3): 372–83. doi:10.1109/JMEMS.2022.3163477.