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Extracting carrier concentration of black c-BN single crystal by mid-infrared reflectance spectroscopy.

Authors :
Wei, Xing
Qi, Hongsheng
Zhu, Siqi
Zhang, Xiangfa
Wang, Yongkai
Ouyang, Xiaoping
Zheng, Wei
Source :
Vacuum. Aug2022, Vol. 202, pN.PAG-N.PAG. 1p.
Publication Year :
2022

Abstract

Cubic boron nitride (c-BN) is a synthetic ultra-wide bandgap semiconductor with attractive application prospects in electronics and optoelectronics. At present, the size of c-BN single crystals obtained by hot pressing method is generally less than 1 mm extremely unfavorable to extracting its carrier concentration through Hall effect measurement. For c-BN crystals, the longitudinal optical phonon-plasma coupling (LOPC) mode which is produced by the coupling of longitudinal optical phonons and free carriers can be observed in mid-infrared reflectance spectrum. Thus, in this work, the mid-infrared reflectance spectrum of the black c-BN crystal grown by hot pressing method is measured. Based on classical dielectric function theory, the carrier concentration of that c-BN sample is finally extracted as 7.14 × 1017 cm−3. Combining electrical measurements, its mobility is also obtained as 11.91 cm2·V-1·s-1. • The highlights of our work is as follows. • This is the first time to extract carrier concentration by fitting LOPC + mode in the mid-infrared reflectance spectrum of the black c-BN crystal, which provides a practical method to obtain the electrical properties without any contact for tiny samples. • The reliability of carrier concentration extracted from mid-infrared reflectance spectrum is confirmed through theoretical simulation. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
0042207X
Volume :
202
Database :
Academic Search Index
Journal :
Vacuum
Publication Type :
Academic Journal
Accession number :
157444511
Full Text :
https://doi.org/10.1016/j.vacuum.2022.111132