Mechanical dissipation by substrate–mode coupling in SiN resonators.

MLA

de Jong, Matthijs H. J., et al. “Mechanical Dissipation by Substrate–mode Coupling in SiN Resonators.” Applied Physics Letters, vol. 121, no. 3, July 2022, pp. 1–7. EBSCOhost, https://doi.org/10.1063/5.0092894.

APA

de Jong, M. H. J., ten Wolde, M. A., Cupertino, A., Gröblacher, S., Steeneken, P. G., & Norte, R. A. (2022). Mechanical dissipation by substrate–mode coupling in SiN resonators. Applied Physics Letters, 121(3), 1–7. https://doi.org/10.1063/5.0092894

Chicago

de Jong, Matthijs H. J., Malte A. ten Wolde, Andrea Cupertino, Simon Gröblacher, Peter G. Steeneken, and Richard A. Norte. 2022. “Mechanical Dissipation by Substrate–mode Coupling in SiN Resonators.” Applied Physics Letters 121 (3): 1–7. doi:10.1063/5.0092894.