Realization of ZnO microrods and Ag nanoparticles on glass and Si substrates by magnetron sputtering and near band edge photoluminescence enhancement from the exciton-plasmon system.

[Display omitted] • A dry method of fabrication of Ag nanoparticles and ZnO microrods heterostructure. • Preferential nucleation of Ag nanoparticles in proximities of ZnO microrods. • Seed assisted growth of ZnO microrods at higher gas pressure and shorter duration. • Near-UV (380 nm) emission enhancement possibly due to exciton-plasmon interaction. • Nearly 3-fold enhancement of near band edge photoluminescence from ZnO microrods. This work presents a physical vapour-based fabrication of an exciton-plasmon system via depositions of ZnO microrods (ZnOµRs) and Ag nanoparticles (AgNPs) on glass and p-type Si substrates. Pulsed DC sputtering of ZnO at a relatively higher Ar pressure and varying applied power enables deposition of ZnOµRs on ZnO seed layers. Sputtering of Ag ensures fabrication of AgNP/ZnOμR heterostructure with good adhesion suitable for device realization. Microstructural analyses confirm formations of wurtzite ZnOμRs and f.c.c. AgNPs. AgNPs are observed as isolated clusters due to preferential nucleation in the proximities of ZnOµRs. UV–vis absorption spectroscopy reveals broad surface plasmon resonance (SPR) of Ag NPs around 538 nm, which experiences a bathochromic shift in AgNP/ZnOμR heterostructure. The photoluminescence (PL) spectra of AgNP/ZnOμR heterostructure suggest a 3-fold enhancement of narrow near band edge (NBE) emission attributed to the exciton-plasmon interaction. [ABSTRACT FROM AUTHOR]