Cite
Influence of Capping Layer on Threshold Voltage for HKMG FinFET With Short Channel.
MLA
Cai, Han-Lun, et al. “Influence of Capping Layer on Threshold Voltage for HKMG FinFET With Short Channel.” IEEE Transactions on Electron Devices, vol. 69, no. 9, Sept. 2022, pp. 4810–14. EBSCOhost, https://doi.org/10.1109/TED.2022.3191993.
APA
Cai, H.-L., Li, R.-L., Li, Z.-Y., Li, Z.-H., Jiang, Y.-L., & Lu, F. (2022). Influence of Capping Layer on Threshold Voltage for HKMG FinFET With Short Channel. IEEE Transactions on Electron Devices, 69(9), 4810–4814. https://doi.org/10.1109/TED.2022.3191993
Chicago
Cai, Han-Lun, Run-Ling Li, Zhao-Yang Li, Zhong-Hua Li, Yu-Long Jiang, and Fang Lu. 2022. “Influence of Capping Layer on Threshold Voltage for HKMG FinFET With Short Channel.” IEEE Transactions on Electron Devices 69 (9): 4810–14. doi:10.1109/TED.2022.3191993.