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Comment on "The effects of radio-frequency bias on electron density in an inductively coupled plasma reactor" [J. Appl. hys. 102, 113302 (2007)].
- Source :
-
Journal of Applied Physics . 10/21/2022, Vol. 132 Issue 15, p1-4. 4p. - Publication Year :
- 2022
-
Abstract
- Sobolewski et al. [J. Appl. Phys. 102, 113302 (2007)] obtained the complex responses of electron density to the long-pulsed RF bias and proposed the gas composition effect as a key underlying factor. In this Comment, the consistent explanations on the complex responses indicate that the ignored slow wall heating should be taken into account. [ABSTRACT FROM AUTHOR]
- Subjects :
- *ELECTRON density
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 132
- Issue :
- 15
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 159808768
- Full Text :
- https://doi.org/10.1063/5.0101636