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Crystal structure and piezoelectric properties of lead-free epitaxial (K,Na)NbO3 thin films grown on Si substrates.
- Source :
-
Applied Physics Letters . 10/24/2022, Vol. 121 Issue 17, p1-6. 6p. - Publication Year :
- 2022
-
Abstract
- Epitaxial growth of lead-free (K,Na)NbO3 (KNN) thin films on (001)SrRuO3/Pt/ZrO2/Si substrates was achieved by using RF magnetron sputtering. X-ray diffraction measurements revealed that lattice constants (a1 = 0.3987 nm, a2 = 0.3959 nm, a3 = 0.4011 nm) of epitaxial KNN thin films with a pseudo cubic system were close to KNN single crystals. Vertical piezoelectric force microscopy observation indicated that the spontaneous polarization Ps with a downward direction was dominant, and the epitaxial KNN thin films were naturally polarized. The epitaxial KNN thin films exhibited low relative dielectric constant (εr ∼ 267). In addition, piezoelectric coefficients |e31,f| showed a constant value of about 6.5 C m−2 with the increase in applied positive voltages. Relatively high converse |e31,f| values were obtained at low applied voltages due to an intrinsic piezoelectric effect. Therefore, the epitaxial KNN thin films might enable piezoelectric microelectromechanical systems driven at low applied voltages. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 121
- Issue :
- 17
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 159931660
- Full Text :
- https://doi.org/10.1063/5.0110135