Cite
Growth-microstructure-thermal property relations in AlN thin films.
MLA
Song, Yiwen, et al. “Growth-Microstructure-Thermal Property Relations in AlN Thin Films.” Journal of Applied Physics, vol. 132, no. 17, Nov. 2022, pp. 1–15. EBSCOhost, https://doi.org/10.1063/5.0106916.
APA
Song, Y., Zhang, C., Lundh, J. S., Huang, H.-L., Zheng, Y., Zhang, Y., Park, M., Mirabito, T., Beaucejour, R., Chae, C., McIlwaine, N., Esteves, G., Beechem, T. E., Moe, C., Dargis, R., Jones, J., Leach, J. H., Lavelle, R. M., Snyder, D. W., & Maria, J.-P. (2022). Growth-microstructure-thermal property relations in AlN thin films. Journal of Applied Physics, 132(17), 1–15. https://doi.org/10.1063/5.0106916
Chicago
Song, Yiwen, Chi Zhang, James Spencer Lundh, Hsien-Lien Huang, Yue Zheng, Yingying Zhang, Mingyo Park, et al. 2022. “Growth-Microstructure-Thermal Property Relations in AlN Thin Films.” Journal of Applied Physics 132 (17): 1–15. doi:10.1063/5.0106916.