Nonlinear and Dotted Defect Detection with CNN for Multi-Vision-Based Mask Inspection.

This paper addresses the problem of nonlinear and dotted defect detection for multi-vision-based mask inspection systems in mask manufacturing lines. As the mask production amounts increased due to the spread of COVID-19 around the world, the mask inspection systems require more efficient defect detection algorithms. However, the traditional computer vision detection algorithms suffer from various types and very small sizes of the nonlinear and dotted defects on masks. This paper proposes a deep learning-based mask defect detection method, which includes a convolutional neural network (CNN) and efficient preprocessing. The proposed method was developed to be applied to real manufacturing systems, and thus all the training and inference processes were conducted with real data produced by real mask manufacturing systems. Experimental results show that the nonlinear and dotted defects were successfully detected by the proposed method, and its performance was higher than the previous method. [ABSTRACT FROM AUTHOR]