Axial Dependence of the Longitudinal RF Magnetic Field and Plasma Parameters in an Inductive Plasma Source with an External Magnetic Field.

The paper presents the results of an experimental study of the axial structure of the longitudinal RF magnetic field and parameters of the plasma of an inductive low-power plasma source placed in a magnetic field of 12–72 G. It is shown that, already in a magnetic field of 24 G, a nonmonotonic dependence of the longitudinal component of the RF magnetic field on the axial coordinate is clearly manifested. The change in the phase of the RF field indicates that a partially traveling wave is formed in the discharge. Probe measurements show that the electron energy distribution function is enriched with fast electrons whose velocity correlates with the phase velocity of the wave. [ABSTRACT FROM AUTHOR]