An analytical model for thermoelastic damping in laminated microring resonators.

• An analytical model is developed to evaluate thermoelastic damping in laminated microring. • More items are needed to converge when values of ∆ E for the layers are quite different. • The temperature gradient in the circumferential direction has little effect on the TED. • Increasing thickness of metallic coating will increase TED of laminated microring resonators. Predicting thermoelastic damping (TED) is crucial in the design of micro-resonators with high quality factors. Until now, some analytical models have been developed to evaluate the TED effect on microrings which are widely used in many micro-resonators. However, most previous works are limited to microrings with single homogeneous material. This paper develops an analytical model for investigating the TED in the laminated microrings. The temperature fields along the thickness and circumferential directions in the laminated microring are presented using the generalized orthogonal expansion technique. The analytical model for the TED is obtained by computing the dissipated energy and the maximum elastic energy in each layer. The present analytical model for evaluating the TED is validated by comparing with the previously published result and the finite element method (FEM). The effects of the thickness and the property of the metallic layer on the TED characteristics of two- and three-layered microrings are analyzed. The present model can be used to optimize the design of the microring resonators with high quality factors. [ABSTRACT FROM AUTHOR]