Cite
High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon.
MLA
Lin, Zhifan, et al. “High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon.” Nanomaterials (2079-4991), vol. 13, no. 3, Feb. 2023, p. 398. EBSCOhost, https://doi.org/10.3390/nano13030398.
APA
Lin, Z., Hu, H., Dai, Y., Zhong, Y., & Xue, S. (2023). High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon. Nanomaterials (2079-4991), 13(3), 398. https://doi.org/10.3390/nano13030398
Chicago
Lin, Zhifan, Hao Hu, Yifan Dai, Yaoyu Zhong, and Shuai Xue. 2023. “High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon.” Nanomaterials (2079-4991) 13 (3): 398. doi:10.3390/nano13030398.