Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology.

Supercritical carbon dioxide (SCCO 2) fluids technology is utilized to improve the performance of Zn 0.5 Mg 0.5 O deep-ultraviolet (DUV) sensor with metal–semiconductor-metal (MSM) structure in this study. The sensitivity of the device can be enhanced double after SCCO 2 fluids treatment. The performance improvement is attributed to the passivation of the interface and the bulk defects resulting from device fabrication process. Based on the material analysis, the oxygen vacancies are reduced after SCCO 2 fluids treatment, which demonstrates these defects can be passivated. This study proposes a potential technology for SCCO 2 fluids to improve the performance of MSM-type Zn 0.5 Mg 0.5 O DUV sensor at low temperatures. [ABSTRACT FROM AUTHOR]