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CALPHAD-Based Modelling of the Temperature–Composition–Structure Relationship during Physical Vapor Deposition of Mg-Ca Thin Films.
- Source :
-
Materials (1996-1944) . Mar2023, Vol. 16 Issue 6, p2417. 10p. - Publication Year :
- 2023
-
Abstract
- The temperature-dependent composition and phase formation during the physical vapor deposition (PVD) of Mg-Ca thin films is modeled using a CALPHAD-based approach. Considering the Mg and Ca sublimation fluxes calculated based on the vapor pressure obtained by employing thermochemical equilibrium calculations, the experimentally observed synthesis-temperature trends in the thin-film composition and phase formation were reproduced. The model is a significant step towards understanding how synthesis parameters control composition and, therefore, phase formation in the PVD of metals with high vapor pressures. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 19961944
- Volume :
- 16
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- Materials (1996-1944)
- Publication Type :
- Academic Journal
- Accession number :
- 162835164
- Full Text :
- https://doi.org/10.3390/ma16062417