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A Compact and High-Precision Three-Degree-of-Freedom Grating Encoder Based on a Quadrangular Frustum Pyramid Prism.
- Source :
-
Sensors (14248220) . Apr2023, Vol. 23 Issue 8, p4022. 10p. - Publication Year :
- 2023
-
Abstract
- A compact and high-precision three-degrees-of-freedom (DOF; X, Y, and Z directions) grating encoder based on the quadrangular frustum pyramid (QFP) prisms is proposed in this paper to solve the insufficient installation space problem of the reading head of the multi-DOF in high-precision displacement measurement applications. The encoder is based on the grating diffraction and interference principle, and a three-DOF measurement platform is built through the self-collimation function of the miniaturized QFP prism. The overall size of the reading head is 12.3 × 7.7 × 3 cm3 and has the potential for further miniaturization. The test results show that three-DOF measurements can be realized simultaneously in the range of X-250, Y-200, and Z-100 μm due to the limitations of the measurement grating size. The measurement accuracy of the main displacement is below 500 nm on average; the minimum and maximum errors are 0.0708% and 2.8422%, respectively. This design will help further popularize the research and applications of multi-DOF grating encoders in high-precision measurements. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 14248220
- Volume :
- 23
- Issue :
- 8
- Database :
- Academic Search Index
- Journal :
- Sensors (14248220)
- Publication Type :
- Academic Journal
- Accession number :
- 163458716
- Full Text :
- https://doi.org/10.3390/s23084022