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Low-impedance internal linear inductive antenna for large-area flat panel display plasma processing.
- Source :
-
Journal of Applied Physics . 3/15/2005, Vol. 97 Issue 6, p063302. 4p. 1 Black and White Photograph, 3 Graphs. - Publication Year :
- 2005
-
Abstract
- An internal-type linear inductive antenna, that is, a double-comb-type antenna, was developed for a large-area plasma source having the size of 1020 mm×830 mm, and high density plasmas on the order of 2.3×1011 cm-3 were obtained with 15 mTorr Ar at 5000 W of inductive power with good plasma stability. This is higher than that for the conventional serpentine-type antenna, possibly due to the low impedance, resulting in high efficiency of power transfer for the double-comb antenna type. In addition, due to the remarkable reduction of the antenna length, a plasma uniformity of less than 8% was obtained within the substrate area of 880 mm×660 mm at 5000 W without having a standing-wave effect. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 97
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 16454418
- Full Text :
- https://doi.org/10.1063/1.1861136