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Easy-to-Prepare Assembly Array of Tungsten Microelectrodes.
- Source :
-
IEEE Transactions on Biomedical Engineering . May2005, Vol. 52 Issue 5, p952-956. 4p. - Publication Year :
- 2005
-
Abstract
- This paper provides a detailed process flow for fabricating an easy-to-prepare, inexpensive, dense array of tungsten microelectrodes. We designed the process flow to minimize routine tasks by separating an initial preparation of a master mold from a routine preparation of substrate replication, array assembly and tip processing. Sandblast processing first produced a glass mold with a pattern of a series of protruding lines at a requested interval of a few hundred micrometers. Copying the groove pattern onto polystyrene mass-produced a replica substrate. Tungsten probes were then aligned on the substrate, and the tips of probes were finely processed in the block. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00189294
- Volume :
- 52
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Biomedical Engineering
- Publication Type :
- Academic Journal
- Accession number :
- 16886771
- Full Text :
- https://doi.org/10.1109/TBME.2005.845224