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Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing.
- Source :
-
IEEE Transactions on Semiconductor Manufacturing . Aug2023, Vol. 36 Issue 3, p327-331. 5p. - Publication Year :
- 2023
-
Abstract
- We discuss inline electrical testing to monitor the baseline of Analog Computing hardware using Phase Change Memory (PCM) technology. Tightening the PCM resistance distribution is necessary to meet analog computation requirement. A new yield methodology is introduced. A study of heater process variation, which will affect the heater height and the PCM resistance, will be discussed. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 08946507
- Volume :
- 36
- Issue :
- 3
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Semiconductor Manufacturing
- Publication Type :
- Academic Journal
- Accession number :
- 170043080
- Full Text :
- https://doi.org/10.1109/TSM.2023.3284313