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Lateral-field-excited thin-film Lamb wave resonator.
- Source :
-
Applied Physics Letters . 4/11/2005, Vol. 86 Issue 15, p154103. 3p. 2 Diagrams, 2 Charts, 2 Graphs. - Publication Year :
- 2005
-
Abstract
- The basic principles and technology for the development of lateral-field-excited Lamb acoustic wave resonators on sputter-deposited c-oriented thin aluminum nitride films are presented. The experimental results demonstrate that Lamb waves can be successfully used as an alternative to high-velocity surface acoustic waves. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 86
- Issue :
- 15
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 17185452
- Full Text :
- https://doi.org/10.1063/1.1900312