Cite
Thermoelectric transport properties of Si, SiGe, and silicide CMOS-compatible thin films.
MLA
Schwinge, Caroline, et al. “Thermoelectric Transport Properties of Si, SiGe, and Silicide CMOS-Compatible Thin Films.” Review of Scientific Instruments, vol. 94, no. 10, Oct. 2023, pp. 1–6. EBSCOhost, https://doi.org/10.1063/5.0164172.
APA
Schwinge, C., Hoffmann, R., Hertel, J., Wislicenus, M., Gerlich, L., Völklein, F., Gerlach, G., & Wagner-Reetz, M. (2023). Thermoelectric transport properties of Si, SiGe, and silicide CMOS-compatible thin films. Review of Scientific Instruments, 94(10), 1–6. https://doi.org/10.1063/5.0164172
Chicago
Schwinge, Caroline, Raik Hoffmann, Johannes Hertel, Marcus Wislicenus, Lukas Gerlich, Friedemann Völklein, Gerald Gerlach, and Maik Wagner-Reetz. 2023. “Thermoelectric Transport Properties of Si, SiGe, and Silicide CMOS-Compatible Thin Films.” Review of Scientific Instruments 94 (10): 1–6. doi:10.1063/5.0164172.