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Cylindrical hot cathode ionisation gauge – The concept and simulations.
- Source :
-
Vacuum . Jan2024:Part A, Vol. 219, pN.PAG-N.PAG. 1p. - Publication Year :
- 2024
-
Abstract
- A novel design of an ionisation vacuum gauge is presented, aiming to achieve predictable sensitivity and high accuracy in high and the ultra-high vacuum range. The proposed design features a belt-like electron beam emitted from a linear filament, following a circular trajectory between two cylindrical electrodes, resembling a cylindrical analyser. The proposed design offers several key upsides: a precisely defined electron beam trajectory with reduced susceptibility to path variations, effective electron collection in a Faraday cup able to contain secondary emissions and backscattered electrons, and the inclusion of a suppressor grid in front of the ion collector to eliminate ion-induced secondary electron emission. These features are expected to secure high stability of the gauge and the low pressure limit. An in-depth description of the design is presented, along with the discussions on simulations of the key components that provide the improved performance. • Novel ionisation gauge design to achieve high accuracy and long term stability. • Circular electron trajectories with reduced susceptibility to variations. • Faraday cup electrode enhances accuracy with effective capture secondary particles. • Suppressor grid reduces IISEY ensuring ion current measurement stability. • Very good agreement between the simulated and experimental sensitivity. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 0042207X
- Volume :
- 219
- Database :
- Academic Search Index
- Journal :
- Vacuum
- Publication Type :
- Academic Journal
- Accession number :
- 173692106
- Full Text :
- https://doi.org/10.1016/j.vacuum.2023.112701