Ultra-precision optical processing technology for large-aperture laser optics: Polishing path and technical parameter of arrayed magnetorheological finishing (AMRF).

• A PSD (Power Spectral Density) analysis method based on the contour of removal function was proposed for AMRF technique. • A new polishing path called "non-equal-interval parallel raster path" customized for AMRF technique was proposed and applied to control mid-spatial-frequency ripple error. • Simulation and actual experiment verified the effects of analysis method and polishing path. With the continuous development of high-power laser systems, laser optics gradually changed towards large-aperture, high-quality. To adapt to the fabrication of large-aperture laser optics, a new-type array magnetorheological finishing (AMRF) technique was developed and had made initial progress. However, AMRF technique would introduce more obvious ripple structures (such as 1 mm−1 of spatial frequency) compared to original MRF technique while adopting conventional raster path, and the ripple structures might affect laser beam transmission. For the further application of AMRF technique, the formation mechanism of ripple structures was studied, and a method based on the contour of removal function was proposed to analyze the changes of spatial frequency and evaluate the effect of different polishing paths. According to the analysis method, non-equal-interval parallel raster path was chosen and applied into AMRF process, along with maintaining efficiency while controlling ripple structures. In general, this work could provide a valuable support for the AMRF process of large-aperture laser optics and had a certain significance for the high-power laser system. [ABSTRACT FROM AUTHOR]