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Synthesis of 4-in. multilayer molybdenum disulfide via space-confinement thermolysis.
- Source :
-
Applied Physics Letters . 11/20/2023, Vol. 123 Issue 21, p1-4. 4p. - Publication Year :
- 2023
-
Abstract
- Two-dimensional (2D) semiconductors like molybdenum disulfide (MoS2) exhibit superior performance at nanometer-scale thickness compared to silicon. Notably, multilayers are more resistant to breakage during transfer and boast enhanced electrical properties over monolayers. In this study, we synthesized 4-in. multilayer MoS2 using a rapid thermal processing system through the ammonium tetrathiomolybdate precursor thermolysis. A 200 nm-scale space confinement on the sample surface was used to reduce sulfur loss during annealing and to facilitate vacancy healing by self-feeding sulfur atoms. Various characterizations confirmed good crystallinity, surface flatness, and continuity, including Raman spectroscopy, x-ray photoelectron spectroscopy, scanning transmission electron microscopy, and atomic force microscopy. Moreover, these samples showed a significant enhancement in electron mobility. Our approach benefits efficiency, scalability, and procedural simplicity, paving a promising path toward large-scale production of multilayer 2D semiconductors. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 123
- Issue :
- 21
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 173861146
- Full Text :
- https://doi.org/10.1063/5.0175474