Back to Search Start Over

Process engineers passing the buck to designers over low-k.

Authors :
Wilson, Ron
Source :
Electronic Engineering Times (01921541). 6/20/2005, Issue 1376, p36-44. 2p.
Publication Year :
2005

Abstract

The article reports that papers and panels at the recent International Interconnect Technology Conference here showed growing fissures in the once-solid compact between the back-end-of-line (BEOL) process engineers who create the interconnect stacks in ICs and the chip designers who use them. In the past, as interconnect geometries have shrunk, process engineers have selected new materials and invented techniques to ensure chip designers would have viable metal resistance and inter metal capacitance with which to do their work. But beginning at the 65-nanometer node, BEOL engineers are retreating as the interconnect integration task goes from hard to Herculean.

Details

Language :
English
ISSN :
01921541
Issue :
1376
Database :
Academic Search Index
Journal :
Electronic Engineering Times (01921541)
Publication Type :
Periodical
Accession number :
17455387