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In-situ SEM micropillar compression and nanoindentation testing of SU-8 polymer up to 1000 s−1 strain rate.
- Source :
-
Materials Letters . Mar2024, Vol. 358, pN.PAG-N.PAG. 1p. - Publication Year :
- 2024
-
Abstract
- • Highest nanoindentation strain rate reported on a polymer: 103 s−1. • Nanoindentation and micropillar compression of SU-8 polymer from 10-3 to 103 s−1. • Novel nanoindentation protocol to obtain reliable modulus and hardness at 103 s−1. • High strain rate properties of SU-8 reported for first time. In situ micropillar compression and nanoindentation were performed on photolithographically fabricated SU-8 polymer inside a scanning electron microscope (SEM), covering seven orders of strain rates from 10-3 to 103 s−1. The extracted mechanical properties – modulus, hardness, yield strength, strain rate sensitivity (SRS) exponent – were systematically compared from both microscale tests and showed excellent agreement. No change in deformation mechanism was observed at high strain rates. We report a novel experimental protocol for high strain rate nanoindentation, comprising of input profile smoothing, that minimizes resonance amplitude during unloading and allows reliable extraction of modulus and hardness using standard Oliver-Pharr analysis. To the best of our knowledge, this is the first report of mechanical properties of SU-8 beyond 1 s−1 strain rate using nanoindentation based tests. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 0167577X
- Volume :
- 358
- Database :
- Academic Search Index
- Journal :
- Materials Letters
- Publication Type :
- Academic Journal
- Accession number :
- 174841304
- Full Text :
- https://doi.org/10.1016/j.matlet.2023.135824