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Comparative Study of the Composition and Structure of the Target (ZrSi2–ZrB2–MoSi2)/Cr and Coatings Formed Using Them by the DCMS and HIPIMS Methods.
- Source :
-
Physics of Atomic Nuclei . Dec2023, Vol. 86 Issue 10, p2206-2211. 6p. - Publication Year :
- 2023
-
Abstract
- This work is devoted to the production of a ceramic target (ZrSi2–ZrB2–MoSi2)/Cr by hot pressing of products of self-propagating high-temperature synthesis and deposition of coatings in the Zr–Si–Mo–B system by DC magnetron sputtering and high-power pulsed magnetron sputtering. The composition and structure of the initial powder mixtures, SHS products, a two-layer functionally graded target, and coatings deposited during its sputtering have been studied. It is shown that the developed target (ZrSi2–ZrB2–MoSi2)/Cr can be successfully used to obtain coatings with a dense homogeneous defect-free structure, including at high-energy sputtering regimes, peak current of 50 A, and peak power of 50 kW. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10637788
- Volume :
- 86
- Issue :
- 10
- Database :
- Academic Search Index
- Journal :
- Physics of Atomic Nuclei
- Publication Type :
- Academic Journal
- Accession number :
- 175828709
- Full Text :
- https://doi.org/10.1134/S1063778823090120